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Core Raw Material for Semiconductors - Photoresist

Time:2023-12-20 Hits:242


Photoresist is a critical material extensively utilized in the fabrication of semiconductors, enabling the creation of microelectronic devices. Its prime attribute is the ability to be patterned via ultraviolet (UV) exposure, followed by processes like chemical etching or ion implantation, to realize the construction of minute electronic structures.
With high resolution, precision, and stability, photoresist is indispensable for developing minuscule yet high-performance devices. Moreover, it boasts commendable chemical inertness and mechanical robustness, ensuring reliability even in intricate processing environments.
The applications of photoresist are far-reaching,spanning semiconductors, optoelectronics, biomedicine, and more. It’s employed in the creation of microprocessors, memory storage, sensors, and other components within semiconductor manufacturing. In optoelectronics, its used for developing optical devices and fibers, while in biomedicine, it facilitates the production of microfluidic chips and biochips.
The synthesis of photoresist requires specific raw materials:
Photoresist monomer: This serves as the foundational material, typically comprising organic compounds with a benzene ring, such as methyl methacrylate (MMA) or styrene (Styrene).
Photoinitiator: Also known as a photosensitizer, this compound triggers polymerization upon absorbing UV light and is pivotal in the photoresist formula. Common examples include styryldinitrobenzamide (DAN) and styryldiisocyanate (DIP).
Solvent: Functioning as the dissolving medium, the solvent regulates the photoresist’s viscosity and flow properties. Typical solvents used are toluene, xylene, and acetone.
Additives: These enhance the photoresist’s properties and can include plasticizers and stabilizers.
These are the primary materials required for photoresist production. Depending on the specific process and performance needs, additional compounds may be incorporated to optimize the photoresist’s characteristics.
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3-tert-butoxystyrene

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4-tert-butoxystyrene

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4-Vinyl phenyl tert-butyl carbonate

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4-vinylphenylacetate

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4-Acetoxystyrene

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9-anthracene acid

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dicyclopentadiene epoxide

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9-anthracene methyl methacrylate

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Bis(7-oxabicyclo[4.1.0]heptane-3-methyl)adipate

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9,9-Bis[(2,3-glycidoxy)phenyl]fluorene (BOAFL)

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Photoresist monomer-Arf monomer



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1-Ethyl cyclopentyl methacrylate

CAS: 266308-58-1

2,2-Dimethylpropyl methacrylate

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1-Adamantyl methacrylate

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2-Methyl-2-adamantyl methacrylate

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2-Ethyl-2-adamantyl methacrylate (EAMA)

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2-Isopropyl-2-adamantane methyl acrylate

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3-Hydroxy-1-adamantyl methacrylate

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Trifluoroethyl methacrylate

CAS: 352-87-4

1,1-dimethylbutyl methacrylate

CAS: 100472-88-6

1,1-dimethylpentyl methacrylate

CAS: 1004549-78-3


光刻胶单体-UV单体


N-acryloylmorpholine

CAS: 5117-12-4

Isobornyl acrylate

CAS: 5888-33-5

Hydroxyethyl methacrylate

CAS: 868-77-9


其他


2,2-Bis(4-glycidoxyphenyl)propane
CAS: 1675-54-3

Benzyl glycidyl ether

CAS: 2930-05-4

2-[(4-vinylphenoxy)methyl]ethylene oxide

CAS: 2653-39-6

1-Methyl-4-(2-methyloxiranyl)-7-oxabicyclo[4.1.0]heptane

CAS: 96-08-2

1-Methylcyclohexylmethacrylate

CAS: 76392-14-8

1-Ethylcyclohexylmethacrylate

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1-Isopropyl-1-cyclohexanol methacrylate

CAS: 811440-77-4

2-Cyclohexylpropan-2-ylmethacrylate

CAS: 186585-56-8

Cyclohexylmethacrylate

CAS: 101-43-9

1-ethylcyclopentyl acrylate

CAS: 326925-69-3

Methylcyclopentyl acrylate

CAS: 178889-49-1

mevalonolactone methacrylate

CAS: 177080-66-9

2-Methacrylate-tetrahydropyran

CAS: 52858-59-0

γ-Butyrolactone-3-ylmethacrylate

CAS: 130224-95-2

Tetrahydrofuran-2-yl methacrylate

CAS: 15895-80-4


2-Carbonyl-tetrahydrofuran-3-hydroxy-methacrylate


CAS: 195000-66-9

2-Oxotetrahydrofuran-3-yl acrylate

CAS: 328249-37-2

(2-Oxo-1,3-dioxolane-4-yl)methyl methacrylate

CAS: 13818-44-5

(5-Oxotetrahydrofuran-2-yl)methyl methacrylate

CAS: 156938-09-9

pyrazole

CAS: 288-13-1

N-methylpyrrolidone

CAS: 872-50-4

tert-butyl methacrylate

CAS: 585-07-9

1,4-Butylene glycol dimethacrylate

CAS: 2082-81-7

Ethylene glycol dimethacrylate

CAS: 97-90-5

2,2,3,3,4,4,4-heptafluoro-butyl methacrylate

CAS: 13695-31-3

2-Oxo-2-(2,2,3,3,3-pentafluoropropoxy)ethyl methacrylate

CAS: 1176273-16-7

2-ethylhexyl methacrylate

CAS: 688-84-6

N-isopropylmethacrylamide

CAS: 13749-61-6

Hydroxypropyl acrylate

CAS: 25584-83-2(91313-64-3)

Diethylaminoethyl methacrylate

CAS: 105-16-8

2-1-Ethoxyethyl methylprop-2-enoate

CAS: 51920-52-6

2-(Bromomethyl)acrylate

CAS: 4224-69-5

Hydroxypropyl methacrylate

CAS: 27813-02-1

2,3-Dihydroxypropyl acrylate

CAS: 10095-20-2

2,5-Dimethylhexane-2,5-diylbis(2-methacrylate))

CAS: 131787-39-8

2-3-(diethoxymethylsilyl)propyl acrylate

CAS: 13732-00-8

2-Carboxy-4-norbornolide-5-methacrylate

CAS: 254900-07-7

2-Carboxy-4-norbornolide-5-acetoxymethacrylate

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Isobornyl methacrylate

CAS: 7534-94-3

1,3-Adamantanediol monoacrylate

CAS: 216581-76-9

1,3-Adamantanediol Diacrylate

CAS: 81665-82-9

1-Adamantyl acrylate

CAS: 121601-93-2


2-(Adamantan-1-yl)but-2-yl methacrylate


CAS: 325991-26-2

2-Methyl-2-adamantanol acrylate

CAS: 249562-06-9

2-Ethyl-2-adamantyl acrylate

CAS: 303186-14-3

2-Isopropyl-2-adamantanol acrylate

CAS: 251564-67-7

Tricyclo[5.2.1.02,6]dec-8-yl acrylate

CAS: 7398-56-3

Tricyclo[5.2.1.02,6]dec-8-yl methacrylate

CAS: 34759-34-7

2-(2,2-Difluorovinyl)bicyclo[2.2.1]heptane

CAS: 123455-94-7

1-(1-Ethoxyethoxy)-4-vinylbenzene

CAS: 157057-20-0

2-4-hydroxyphenyl methyl-2-acrylate

CAS: 31480-93-0

1-Isopropoxy-4-vinylbenzene

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3-(4-Vinylphenoxy)-1-propene

CAS: 16215-47-7

3,5-diacetoxystyrene

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4-(4-(Acryloyloxy)butoxy)benzoic acid

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4-Isopropylphenol
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3,4-diacetoxystyrene

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2-vinyl naphthalene

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(9H-Fluorene-9,9-diyl)bis(methylene)diacrylate

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N-Hydroxynaphthalimide trifluoromethanesulfonic acid

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5-Methylbenzotriazole

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6-(2-Methyl-1-oxo-2-propen-1-yl)-6-azabicyclo[3.2.0]-7-heptanone

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(4-Phenylthiophenyl)diphenylsulfonium triflate

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Bis(4-tert-butylphenyl)iodonium perfluorobutane sulfonate

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Bis[4-(1,1-dimethylethyl)phenyl]iodonium and triflate

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Bis(4-tert-butylphenyl)iodonium chloride

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Diphenyl iodide chloride

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diphenyl iodine bromide

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diphenyl iodide

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triphenylsulfonium bromide

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4-tert-butylphenylsulfonium nonafluorobutane sulfonate

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triphenylsulfonium iodide salt

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triphenylsulfonium tetrafluoroborate

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Triphenylsulfonium hexafluoride phosphorus salt

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Triphenylsulfonium perfluorobutanesulfonate

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Triphenylsulfonium and triflate

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(4-Methoxyphenyl)diphenylsulfonium triflate

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(4-Fluorophenyl)diphenylsulfonium triflate

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triphenyl sulfonium chloride salt

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8-Hydroxyquinoline, Aluminum

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Guanidine thiocyanate

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Photoinitiator (photosensitizer)



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2-(4-Methylbenzyl)-2-(dimethylamino)-1-(4-morpholinophenyl)-1-butanone

   (photoinitiator-379) 

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1-[9-Ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]ethanone 1-(O-acetyloxime)

Photoinitiator-OXE-02) 

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2,2-Diethoxyacetophenone

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2-Hydroxy-2-methyl-1-(4-methoxy)phenyl-1-propanone

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2-Ethyl anthraquinone

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4-Benzoyl-4'-methyl-diphenyl sulfide

Photoinitiator-BMS)

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4-Isobutylphenyl-4'-methylphenyl iodide hexafluorophosphate

photoinitiator-250)

CAS: 344562-80-7

3-Methyl-4-phenylbenzophenone

photoinitiator-6012) 

CAS: 86428-83-3

2,2'-Bis(o-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-bisimidazole

Photoinitiator-BCIM) 

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Dimethylaminoethyl benzoate

CAS: 2208-05-1

Diphenyl-(4-phenylthio)phenylsulfonium hexafluoroantimonate

Photoinitiator UVI-6976)

CAS: 71449-78-0

Bis[4-diphenylsulfophenyl]sulfide dihexafluoroantimonate

CAS: 8945-2-37-9

Diphenyl-(4-phenylthio)phenylsulfonium hexafluorophosphate

Photoinitiator UVI-6992) 

CAS: 68156-13-8

1,1'-(Methylenebis-4,1-phenylene)bis[2-hydroxy-2-methyl-1-propanone]

   (photoinitiator-127)

CAS: 474510-57-1

Photoinitiator-EPBF


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Photoinitiator-OXE-01) 

CAS: 253585-83-0

Photoinitiator-PAG


Photoinitiator-PAG-006


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CAS: 74227-35-3

Bis(4-tert-butylphenyl)iodonium hexafluorophosphate

CAS: 61358-25-6

Bifunctional ketone sulfone

CAS: 272460-97-6

Bifunctional A-hydroxyketone

CAS: 71868-15-0

Tetraethyl Michler's ketone (photoinitiator-EMK)

CAS: 90-93-7

propylene carbonate

CAS: 108-32-7

2-Methyl-2-(4-morpholinyl)-1-[4-(methylthio)phenyl]-1-propanone

photoinitiator-907) 

CAS: 71868-10-5

(2,4,6-Trimethylbenzoyl)diphenylphosphine oxide

Photoinitiator-TPO)

CAS: 75980-60-8

2-Isopropyl Thiaxanthone (Photoinitiator-ITX)

CAS: 5495-84-1

Benzoin Dimethyl Ether
 (Photoinitiator-BDK)

CAS: 24650-42-8


2-Hydroxy-2-methyl-1-phenylacetone (photoinitiator-1173)

CAS: 7473-98-5

1-Hydroxy-cyclohexyl-phenyl ketone (photoinitiator-184)

CAS: 947-19-3

2,4-Diethyl Thiaxantrone 
(Photoinitiator-DETX)

CAS: 82799-44-8